20v-60v bcd technology is an low on resistance bcd platform which was independently developed by fmic. this typical process is compatible with conventional cmos process. it performs strong driving ability, low cost, high additional value. product of this platform can be applied in field of power management, led driver and automotive electronics etc.
process features
ø with buried layer and n-type epi；
ø dual poly gate, poly-1 for hv device gate；poly-2 for logical device gate；
ø locos and pn junction isolation
ø dual field oxide structure；
ø sin spacer；
ø tungsten plug for contact and via；
ø thick top metal option(tbd)；
ø 20 mask, 20 photo layers for 40v/5v bcd.
applications
ø driver ic
ø power management ic
ø class d amplifier
ø hv analog product